{"id":4906,"date":"2020-11-06T19:56:53","date_gmt":"2020-11-06T19:56:53","guid":{"rendered":"https:\/\/aerotechinc.wpengine.com\/?page_id=4906"},"modified":"2024-02-23T13:38:29","modified_gmt":"2024-02-23T18:38:29","slug":"wafer-inspection-and-metrology","status":"publish","type":"page","link":"https:\/\/www.aerotech.com\/industries\/wafer-inspection-and-metrology\/","title":{"rendered":"Wafer Inspection & Metrology"},"content":{"rendered":"
\n \"\"\n
\n
\n
\n
\n
WAFER INSPECTION & METROLOGY<\/h5>

Enhancing the most advanced wafer processing systems.<\/span><\/h1> <\/div>\n\n

We offer solutions for thin film measurement, optical wafer inspection, electron beam inspection, microscopy and reticle\/mask inspection.<\/p>\n\n <\/div>\n <\/div>\n <\/div>\n<\/section>

\n \n
\n
\n
\n
\n
\n

The Most Versatile Positioning Solutions<\/h3>
\n
\n
\n

We have\u00a050+ years of experience designing<\/a>\u00a0standard serial-stacked wafer stages, low-profile integrated XY stages and planar air-bearing solutions for the wafer inspection market. When a standard system doesn\u2019t work, we can\u00a0build a custom solution<\/a>\u00a0for your exact needs.<\/p>\n <\/div>\n <\/div>\n <\/div>\n <\/div>\n

\n \"\" <\/div>\n <\/div>\n
\n \"Aerotech\n <\/div>\n <\/div>\n <\/div>\n\n
\n
\n
\n
\n

The Ultimate in Precision<\/h3>
\n
\n
\n

Our\u00a0planar air-bearing solutions<\/a>, coupled with laser interferometry, minimize wafer-plane errors and Abbe offset. Advanced silicon carbide solutions with advanced controls deliver nanometer-level positioning with high wafer-per-hour throughput.<\/p>\n <\/div>\n <\/div>\n <\/div>\n <\/div>\n

\n \"\" <\/div>\n <\/div>\n <\/div>\n <\/div>\n\n
\n
\n
\n
\n

Cleanroom Manufacturing<\/h3>
\n
\n
\n

We operate with the highest levels of cleanliness for next-generation wafer processing. Our temperature-controlled, ISO Class 6 cleanroom facilities with cell-specific ISO Class 5 capability ensure the high-quality, reliable manufacturing of our positioning solutions<\/a>.<\/p>\n <\/div>\n <\/div>\n <\/div>\n <\/div>\n

\n \"\" <\/div>\n <\/div>\n
\n \"Aerotech\n <\/div>\n <\/div>\n <\/div>\n\n <\/div>\n <\/section>
\n
\n

Related Products<\/h2> \n \n
\n
\n \n
\n \"Product \n <\/div>\n

Stages & Actuators<\/p>\n \n